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Theses
epitaxy
Skeide, Ottmar
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Theses
epitaxy
Skeide, Ottmar
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E-Book
Allotaxie: ein neues Verfahren zur Herstellung von Eisendisilizid- und Siliziumdioxid-Heterostrukturen in Silizium [E-Book] /
Skeide, Ottmar
1994
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Theses
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ZB
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Name
Skeide, Ottmar
Subject
epitaxy
semiconductor heterostructure
1
silicide
1
Classification
FFPE - Thin film electronic properties, semiconductor interfaces
1
FGK - Thin film technology, epitaxy
1
Language
German
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