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Theses
epitaxy
FGKF - Chemical vapor deposition
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Theses
epitaxy
FGKF - Chemical vapor deposition
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Atomlagenabscheidung von Hafniumoxid /
Zilbauer, Thomas
2010
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Zilbauer, Thomas
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chemical vapor deposition
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epitaxy
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FGKF - Chemical vapor deposition
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