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Theses
thin film
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silicide
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Theses
thin film
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silicide
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1
E-Book
Amorphisierung und Spannungsabbau in Silizidfilmen unter Ionenbeschuß [E-Book] /
Hardtke, Christoph
1992
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2
E-Book
Untersuchung von dünnen Silizidschichten auf Silizium mittels Elektronenspektroskopiemethoden [E-Book] /
Popovic, Srdjan
1991
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2
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Book
2
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Theses
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ZB
2
Name
Hardtke, Christoph
1
Popovic, Srdjan
1
Subject
silicide
thin film
amorphization
1
electron spectroscopy
1
ion beam surface modification
1
silicon
1
Classification
FJKB - Elemental semiconductors
2
FFP - Physics of thin films
1
FFPE - Thin film electronic properties, semiconductor interfaces
1
FGGE - Ion beam surface modification
1
Language
German
2
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