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thin film technology
FGKF - Chemical vapor deposition
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thin film technology
FGKF - Chemical vapor deposition
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Entwicklung und Aufbau einer neuartigen MOCVD-Anlage zum Wachstum ferroelektrischer Dünnschichten [E-Book] /
Schäfer, Patrick Ralf
2002
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Schäfer, Patrick Ralf
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chemical vapor deposition
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ferroelectric material
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thin film technology
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FGK - Thin film technology, epitaxy
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FGKF - Chemical vapor deposition
FJBE - Ferroelectric materials
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German
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