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Lüth, H.
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Moers, J.
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Alvarez, J.
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Journal Article
Patterning of sub 50nm structures for diffusion investigations in double-gate MOSFETs
Moers, J.
2004
Verhandlungen der Deutschen Physikalischen Gesellschaft, 39 (2004) S. 173 HL10
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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