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Lüth, H. AND Moers, J. AND van der Hart, A.

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Lüth, H. AND Moers, J. AND van der Hart, A.

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Conference Presentation 3 Journal Article 3 Contribution to a book 2 Contribution to a conference proceedings 2 Poster 2 Talk (non-conference) 1

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1

Journal Article

Patterning of 25nm wide Silicon Ridges for vertical Double-Gate MOSFETs

Trellenkamp, S.
2003

Verhandlungen der Deutschen Physikalischen Gesellschaft, 38 (2003) S. 5

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Journal Article

Patterning of 25-nm-wide silicon webs with an aspect ratio of 13

Trellenkamp, S.
2003

Microelectronic engineering, 67-68 (2003) S. 376 - 380

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Journal Article

Top contact for vertical double-gate MOSFETs

Moers, J.
2002

Microelectronic engineering, 64 (2002) S. 465 - 471

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Top contact for vertical double-gate MOSFETs

Moers, J.
2002

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5

Contribution to a book
Contribution to a conference proceedings

Process steps for a double gate MOSFET with vertical layout

Trellenkamp, S.
2002

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Conference Presentation

Process steps for a double gate MOSFET with vertical layout

Trellenkamp, S.
2002

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7

Patterning of 25 nm wide silicon webs with an aspect ratio of 13

Trellenkamp, S.
2002

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Conference Presentation

Herstellung von Siliziumstegen im Dekananometerbereich

Trellenkamp, S.
2002

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9

Conference Presentation

Nanostrukturierung und optische Lithographie mit DUV-Photoresists bei der Herstellung vertikaler MOSFETs

Trellenkamp, S.
2001

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10

Talk (non-conference)

Vertical silicon MOSFETs based on selective epitaxial growth

Moers, J.
2000

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Contribution to a book
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Vertical silicon MOSFETs based on selective epitaxial growth

Moers, J.
2000

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Publications database 11

Conference Presentation 3 Journal Article 3 Contribution to a book 2 Contribution to a conference proceedings 2 Poster 2 Talk (non-conference) 1

Kordos, P. 11 Lüth, H. Moers, J. van der Hart, A. Trellenkamp, Stefan 9 Marso, M. 5 more ... Fox, P. T. 2 Goryll, M. 2 Hogg, S. 2 Klaes, D. 2 Mantl, S. 2 Tönnesmann, A. 2 Vescan, L. 2 Flücken, R. 1 see all ... less ...

Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik 8 Halbleiterbauelemente und Analytik 3 Halbleiterschichtsysteme und Mesoskopische Strukturen 1 Ionen- und Lithographietechnik 1

Institut für Halbleiterschichten und Bauelemente; ISG-1 9 Institut für Schicht- und Ionentechnik; ISI 2 Institut für Bio- und Chemosensoren; ISG-2 1

2002 6 2000 2 2003 2 2001 1

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