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Lüth, H.
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Schubert, Jürgen
2002
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Lüth, H.
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Schubert, Jürgen
2002
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Journal Article
Solid-state thin film sensors based on chalcogenide materials prepared by means of planar technology and pulsed laser deposition
Vlasov, Yu. G.
2002
Journal of applied electrochemistry, 75 (2002) S. 365
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Innovative Schichttechniken und Messprinzipien für kapazitive Feldeffekttransistoren
Schöning, M. J.
2002
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Talk (non-conference)
Silicon-based thin film chemical microsensors with chalcogenide glass membranes for multicomponent analysis in industrial and environmental monitoring
Mourzina, Y.
2002
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Talk (non-conference)
Innovative Schichttechniken und Messprinzipien für kapazitive Feldeffekttransistoren
Schöning, M. J.
2002
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Talk (non-conference)
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Name
Lüth, H.
Schubert, Jürgen
Schöning, Michael J.
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Yoshinobu, T.
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Legin, A.
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Steffen, A.
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Ermolenko, Y.
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Kloock, J.
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Mourzina, Yu. G.
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Vlasov, Y.
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Institut für Bio- und Chemosensoren; ISG-2
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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