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Lüth, H.
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Trellenkamp, Stefan
Journal Article
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Lüth, H.
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Trellenkamp, Stefan
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Select result number 1
1
Journal Article
Non-uniform distribution of induced strain in a gate recessed AlGaN/GaN structure evaluated by micro-PL measurements
Mikulics, M.
2012
Semiconductor science and technology, 27 (2012) S. 105008
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2
Journal Article
Gate-controlled Quantum collimation in nanocolumn resonant tunnelling transistors
Wensorra, J.
2009
Nanotechnology, 20 (2009) S. 465402
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3
Journal Article
Patterning of sub 50nm structures for diffusion investigations in double-gate MOSFETs
Moers, J.
2004
Verhandlungen der Deutschen Physikalischen Gesellschaft, 39 (2004) S. 173 HL10
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4
Journal Article
Patterning of 25nm wide Silicon Ridges for vertical Double-Gate MOSFETs
Trellenkamp, S.
2003
Verhandlungen der Deutschen Physikalischen Gesellschaft, 38 (2003) S. 5
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5
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Patterning of 25-nm-wide silicon webs with an aspect ratio of 13
Trellenkamp, S.
2003
Microelectronic engineering, 67-68 (2003) S. 376 - 380
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6
Journal Article
Top contact for vertical double-gate MOSFETs
Moers, J.
2002
Microelectronic engineering, 64 (2002) S. 465 - 471
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6
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Journal Article
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Lüth, H.
Trellenkamp, Stefan
Moers, J.
5
Kordos, P.
4
van der Hart, A.
3
Mantl, S.
2
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Marso, M.
2
Alvarez, J.
1
Goryll, M.
1
Gregusová, D.
1
Grützmacher, Detlev
1
Hardtdegen, Hilde
1
Hogg, S.
1
Indlekofer, K. M.
1
Kluth, P.
1
Kluth, S.
1
Kretz, J.
1
Lepsa, M. I.
1
Mikulics, Martin
1
Simek, P.
1
Sofer, Z.
1
Wensorra, J.
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
4
Grundlagen für zukünftige Informationstechnologien
2
Contributing Institute
Institut für Halbleiterschichten und Bauelemente; ISG-1
4
JARA-FIT; JARA-FIT
2
Halbleiter-Nanoelektronik; IBN-1
1
Halbleiter-Nanoelektronik; PGI-9
1
Prozesstechnologie; IBN-PT
1
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2003
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2002
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