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Lüth, H. AND Trellenkamp, Stefan

2003

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Lüth, H. AND Trellenkamp, Stefan

2003

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Contribution to a book 2 Contribution to a conference proceedings 2 Journal Article 2 Talk (non-conference) 2 Conference Presentation 1 Poster 1

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Journal Article

Patterning of 25-nm-wide silicon webs with an aspect ratio of 13

Trellenkamp, S.
2003

Microelectronic engineering, 67-68 (2003) S. 376 - 380

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Contribution to a book
Contribution to a conference proceedings

Double gate MOSFET with vertical channel

Moers, J.
2003

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Talk (non-conference)

Double gate MOSFET with vertical channel

Moers, J.
2003

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Journal Article

Patterning of 25nm wide Silicon Ridges for vertical Double-Gate MOSFETs

Trellenkamp, S.
2003

Verhandlungen der Deutschen Physikalischen Gesellschaft, 38 (2003) S. 5

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Talk (non-conference)

Vertical Double-Gate MOSFETs

Moers, J.
2003

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Conference Presentation

Vertical p-channel Double-Gate MOSFETs

Moers, J.
2003

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Contribution to a book
Contribution to a conference proceedings

Vertical p-channel Double-Gate MOSFETs

Moers, J.
2003

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From Silicon Nanostructures to Double Gate MOSFET

Moers, J.
2003

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Publications database 8

Contribution to a book 2 Contribution to a conference proceedings 2 Journal Article 2 Talk (non-conference) 2 Conference Presentation 1 Poster 1

Kordos, P. 8 Lüth, H. Moers, J. 8 Trellenkamp, Stefan Goryll, M. 6 Mantl, S. 6 more ... von der Hart, A. 5 Kluth, P. 3 Zhao, Q.-T. 3 Hogg, S. 2 Marso, M. 2 van der Hart, A. 2 Kluth, S. 1 Kluth, S. M. 1 see all ... less ...

Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik 8

Institut für Halbleiterschichten und Bauelemente; ISG-1 8

2003

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