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Lüth, H.
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Moers, J.
Conference Presentation
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Lüth, H.
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1
Conference Presentation
Overlay of E-Beam generated patterns for the application in vertical gate all-arround MOSFET devices
Moers, J.
2005
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2
Conference Presentation
Patterning of sub 50nm structures for diffusion investigations in vertical double-gate MOSFETs
Moers, J.
2004
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3
Conference Presentation
Vertical Double-Gate MOSFETs
Moers, J.
2004
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4
Conference Presentation
Vertical p-channel Double-Gate MOSFETs
Moers, J.
2003
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5
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Herstellung von Siliziumstegen im Dekananometerbereich
Trellenkamp, S.
2002
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6
Conference Presentation
Process steps for a double gate MOSFET with vertical layout
Trellenkamp, S.
2002
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7
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Thin low-temperature gate oxides for vertical field-effect transistors
Goryll, M.
2002
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8
Conference Presentation
Nanostrukturierung und optische Lithographie mit DUV-Photoresists bei der Herstellung vertikaler MOSFETs
Trellenkamp, S.
2001
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Conference Presentation
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Lüth, H.
Moers, J.
Trellenkamp, Stefan
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Kordos, P.
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Mantl, S.
3
Marso, M.
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van der Hart, A.
3
von der Hart, A.
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Goryll, M.
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Alvarez, D.
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Flücken, R.
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Kluth, P.
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Kluth, S.
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
7
Halbleiterbauelemente und Analytik
1
Halbleiterschichtsysteme und Mesoskopische Strukturen
1
Ionen- und Lithographietechnik
1
Contributing Institute
Institut für Halbleiterschichten und Bauelemente; ISG-1
8
Center of Nanoelectronic Systems for Information Technology; CNI
1
Institut für Bio- und Chemosensoren; ISG-2
1
Scientific Report
2002
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2004
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2001
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