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Lüth, H. AND Moers, J.

Halbleiterbauelemente und Analytik

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Lüth, H. AND Moers, J.

Halbleiterbauelemente und Analytik

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Journal Article 4 Talk (non-conference) 4 Contribution to a book 2 Contribution to a conference proceedings 2 Conference Presentation 1

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Contribution to a book
Contribution to a conference proceedings

Vertical double-gate MOSFET based on epitaxial growth by LPCVD

Moers, J.
2001

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2

Talk (non-conference)

Vertical double-gate MOSFET based on epitaxial growth by LPCVD

Moers, J.
2001

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3

Conference Presentation

Nanostrukturierung und optische Lithographie mit DUV-Photoresists bei der Herstellung vertikaler MOSFETs

Trellenkamp, S.
2001

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Talk (non-conference)

Vertical silicon MOSFETs based on selective epitaxial growth

Moers, J.
2000

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5

Contribution to a book
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Vertical silicon MOSFETs based on selective epitaxial growth

Moers, J.
2000

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6

Journal Article

19 GHz vertical Si p-channel MOSFET

Moers, J.
1999

Electronics letters, 35 (1999) S. 239

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7

Talk (non-conference)

Vertikale Si-MOSFETs mit reduzierten parasitären Kapazitäten

Moers, J.
1999

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8

Journal Article

Vertical p-MOSFETs with gate oxide deposition before selective epitaxial growth

Moers, J.
1999

Solid state electronics, 43 (1999) S. 529 - 535

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Journal Article

A 19 Ghz vertical Si p-channel MOSFET

Moers, J.
1999

Electronics letters, 35 (1999) S. 239

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10

Talk (non-conference)

Selectively grown vertical Si MOS transistor with reduced overlap capacitances

Klaes, D.
1998

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Journal Article

Selectively grown vertical Si MOS transistor with reduced overlap capacitances

Klaes, D.
1998

Thin solid films, 336 (1998) S. 306 - 308

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Publications database 11

Journal Article 4 Talk (non-conference) 4 Contribution to a book 2 Contribution to a conference proceedings 2 Conference Presentation 1

Lüth, H. Moers, J. Vescan, L. 10 Kordos, P. 9 Klaes, D. 8 Tönnesmann, A. 8 more ... Marso, M. 6 Wickenhäuser, S. 6 Marso, M. A. 5 Grabolla, T. 3 Trellenkamp, Stefan 3 van der Hart, A. 3 Fox, P. T. 2 Grimm, M. 2 Flücken, R. 1 see all ... less ...

Halbleiterbauelemente und Analytik Halbleiterschichtsysteme und Mesoskopische Strukturen 3 Ionen- und Lithographietechnik 1

Institut für Schicht- und Ionentechnik; ISI 8 Institut für Halbleiterschichten und Bauelemente; ISG-1 3 Institut für Bio- und Chemosensoren; ISG-2 1

1999 3 2000 3 2001 3 1998 2

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