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Lüth, H.
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Grimm, M.
1998
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Lüth, H.
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Grimm, M.
1998
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1
Talk (non-conference)
Selectively grown vertical Si MOS transistor with reduced overlap capacitances
Klaes, D.
1998
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Journal Article
Selectively grown vertical Si MOS transistor with reduced overlap capacitances
Klaes, D.
1998
Thin solid films, 336 (1998) S. 306 - 308
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Talk (non-conference)
Optimierung der Schichtdickenhomogenität im Schichtsystem AlAs/GaAs in AUX-200-Reaktoren unter Verwendung von Stickstoff als Trägergas
von der Ahe, M.
1998
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3
Document Type
Talk (non-conference)
2
Journal Article
1
Name
Grimm, M.
Lüth, H.
Grabolla, T.
2
Klaes, D.
2
Marso, M. A.
2
Moers, J.
2
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Tönnesmann, A.
2
Vescan, L.
2
Wickenhäuser, S.
2
Gauer, D.
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Hardtdegen, H. H.
1
Kaluza, A.
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Wirtz, K.
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von der Ahe, M.
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Research Program
Halbleiterbauelemente und Analytik
2
Halbleiterschichtsysteme und Mesoskopische Strukturen
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Institut für Schicht- und Ionentechnik; ISI
3
Scientific Report
1998
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