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1

Journal Article

Optimized marker definition for high overlay accuracy e-beam lithography

Moers, J.
2012

Microelectronic engineering, 97 (2012) S. 68 - 71

2

Journal Article

Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography

Brose, S.
2012

Thin solid films, 520 (2012) S. 5080 - 5085

3

Journal Article

Integration of MOSFETs with SiGe dots as stressor material

Nanver, L.K.
2011

Solid state electronics, 60 (2011) S. 75 - 83

4

Journal Article

X-ray Nanodiffraction on a Single SiGe Quantum Dot inside a Functioning Field-Effect Transistor

Hrauda, N.
2011

Nano letters, 11 (2011) S. 2875 - 2880

5

Talk (non-conference)

MOVPE von GaN zur Herstellung von Nanostrukturen durch reaktives Ionenätzen

Haab, A.
2011

6

Optimised marker definition for high overlay accuracy e-beam lithography

Moers, J.
2011

7

Conference Presentation

SiGe-quantum dot arrays for Single Photon Detection

Moers, J.
2011

8

Journal Article

Etching titanium nitride gate stacked on high-k dielectric

Gerharz, J.
2011

Microelectronic engineering, 88 (2011) S. 2541 - 2543

9

Journal Article

Giant mesoscopic photoconductance fluctuations in Ge/Si quantum dot system

Stepina, P.
2011

Applied physics letters, 98 (2011) S. 142101

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10

Contribution to a book
Contribution to a conference proceedings

SiGe-quantum dot arrays for Single Photon Detection

Moers, J.
2011

11

Etching Titanium Nitride gate stacked on high-k dielectric

Gerharz, J.
2010

12

Talk (non-conference)

Investigations on strained Si channels above buried 2D peridoc SiGe islands integrated into a Field-Effect Transistor

Hrauda, N.
2010

13

Talk (non-conference)

Single photon detection by means of SiGe-quantum dot arrays

Moers, J.
2010

14

Talk (non-conference)

Characterization of GdScO3 layers by spectroscopic ellipsometry

Moers, J.
2010

15

Talk (non-conference)

Dot-Field Effect Transistor: Using locally strained silicon for MOSFET applications

Moers, J.
2010

16

Contribution to a book
Contribution to a conference proceedings

Etching Titanium Nitride gate stacked on high-k dielectric

Gerharz, J.
2010

17

Contribution to a book
Contribution to a conference proceedings

Single photon detection by means of SiGe-quantum dot arrays

Moers, J.
2010

18

Journal Article

Photo-induced conductance fluctuations in mesoscopic Ge/Si systems with quantum dots

Stepina, N.P.
2010

Journal of physics / Conference Series, 245 (2010) S. 012034

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19

Journal Article

Influence of the epitaxial growth and device processing on the overlay accuracy during processing of the d-DotFET

Moers, J.
2010

Thin solid films, 518 (2010) S. 2565 - 2568

20

Journal Article

n-Channel MOSFETs Fabricated on SiGe Dots for Strain-Enhanced Mobility

Jovanovic, V.
2010

IEEE Electron Device Letters, 31 (2010) S. 1083 - 1085

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