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Hara, M.
2005
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Li, Z.
2005
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65
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66
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Han, B.
2005
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67
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68
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Han, B.
2005
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69
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70
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71
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72
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73
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74
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76
Journal Article
Surface science, 599 (2005) S. 76 - 84
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77
Journal Article
Materials science in semiconductor processing, 8 (2005) S. 31 - 34
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78
Journal Article
Journal of vacuum science & technology / A, 23 (2005) S. 1535
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79
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80
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Li, Z.
2005
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