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1
Listopad, A.
2012
2012
Review of scientific instruments, 83 (2012) 2, S. 02B707 -
Published under German "Allianz" Licensing conditions on 2012-02-10. Available in OpenAccess from 2012-02-10
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Deposition and qualification of tungsten coatings produced by plasma deposition in WF6 precursor gas
Philipps, V.
2011
2011
Physica scripta, T145 (2011) S. 014030