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Conference Presentation
Moers, J.
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Moers, J.
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1
Conference Presentation
The disposable Dot Field Effect Transistor: Process flow and overlay requirements
Moers, J.
2008
“
...
Halbleiter
-
Nanoelektronik
;
IBN
-
1
Halbleiter-Nanoelektronik...
”
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2
Conference Presentation
Disposable DotFET: A MOSFET based on locally strained silicon
Moers, J.
2008
“
...
Halbleiter
-
Nanoelektronik
;
IBN
-
1
Halbleiter-Nanoelektronik...
”
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3
Conference Presentation
The disposable DotField Effect Transistor
Moers, J.
2008
“
...
Halbleiter
-
Nanoelektronik
;
IBN
-
1
Halbleiter-Nanoelektronik...
”
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4
Conference Presentation
Disposable DotFET: Overlay requirements and the accuracy of E-Beam lithography on structures defined by optical lithography
Moers, J.
2008
“
...
Halbleiter
-
Nanoelektronik
;
IBN
-
1
Halbleiter-Nanoelektronik...
”
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5
Conference Presentation
Characterization of GdScO3 Layers by Spectroscopic Ellipsometry
Moers, J.
2007
“
...
Halbleiter
-
Nanoelektronik
;
IBN
-
1
Halbleiter-Nanoelektronik...
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Conference Presentation
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Moers, J.
Gerharz, J.
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Grützmacher, Detlev
4
Mussler, G.
2
Nanver, L. K.
2
Trellenkamp, Stefan
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von der Hart, A.
2
Mantl, S.
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Roeckerath, M.
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Schubert, Jürgen
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Research Program
Grundlagen für zukünftige Informationstechnologien
5
Contributing Institute
Center of Nanoelectronic Systems for Information Technology; CNI
5
Halbleiter-Nanoelektronik; IBN-1
5
Prozesstechnologie; IBN-PT
2
Scientific Report
2008
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2007
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