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Contribution to a conference proceedings
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Contribution to a conference proceedings
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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1
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Strained silicon on relaxed SiGe made by ion implantation and strain transfer
Mantl, S.
2004
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The use of ion implantation and annealing for the fabrication of strained silicon on thin SiGe virtual substrates
Buca, D.
2004
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Thin strain relaxed SiGe buffer layers on Si and SOI made by He ion implantation and annealing
Mantl, S.
2003
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Scanning probe techniques
Ebert, P.
2003
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Critical dimensions for the formation of misfit dislocations in In0.6Ga0.4As islands on GaAs(001)
Tillmann, R. G. E.
2002
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Strain relaxation of He implanted, pseudomorphic Si1-xGex layers on Si(100)
Holländer, B.
2002
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Contribution to a book
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Holländer, Bernhard
4
Luysberg, Martina
4
Mantl, S.
4
Loo, R.
3
Caymax, M.
2
Herzog, H.-J.
2
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Houben, L.
2
Hüging, N.
2
Lenk, Steffi
2
Trinkaus, H.
2
Bauer, M.
1
Buca, Dan Mihai
1
Carius, R.
1
Ebert, P.
1
Fichtner, P. F. P.
1
Förster, A.
1
Hackbarth, T.
1
Hackbarth, Th.
1
Hogg, S. M.
1
Kirch, D.
1
Mörschbächer, M.
1
Mörschbächer, M. J.
1
Roelofs, A.
1
Schäfer, H.
1
Szot, K.
1
Tillmann, R. G. E.
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Research Program
Kondensierte Materie
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
Contributing Institute
Mikrostrukturforschung; IFF-IMF
6
Institut für Halbleiterschichten und Bauelemente; ISG-1
4
Center of Nanoelectronic Systems for Information Technology; CNI
1
Elektrokeramische Materialien; IFF-EKM
1
Scientific Report
2002
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2003
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2004
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