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Physik mikrostrukturierter Halbleiter, 23 (2001) S. 31
...2001...
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Journal of vacuum science & technology / B, 19 (2001) S. 1721
...2001...
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Marso, M.
2001
Electronics letters, 37 (2001) S. 1478
...2001...
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Marso, M.
2001
Physica status solidi / A, 188 (2001) S. 199
...2001...
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