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Journal Article
Microelectronic engineering, 55 (2001) S. 151
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Talk (non-conference)
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Conference Presentation
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Journal Article
Kluth, P.
2001
Microelectronic engineering, 55 (2001) S. 177
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Poster
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Journal Article
Journal of applied physics, 87 (2000) S. 133
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7
Journal Article
Buchal, C.
2000
Materials science in semiconductor processing, 3 (2000) S. 399
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