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Ionentechnik
Schmid, M.
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Ionentechnik
Schmid, M.
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1
Journal Article
Buried ZnTe nanocrystallites in thermal SiO2 on silicon synthesized by high dose ion implantation
Karl, H.
2001
Nuclear instruments & methods in physics research / B, 178 (2001) S. 126
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2
Conference Presentation
An electrooptical BaTiO3 thin film waveguide modulator
Petraru, A.
2001
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3
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Elektrische und strukturelle Untersuchung an Ba0.7Sr0.3TiO3-Dünnschichten hergestellt durch PLD
Trithaveesak, O.
2001
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4
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Herstellung und Charakterisierung von dünnen Filmen aus Ba0.7Sr0.3TiO3 und LaAlO3 auf Si(100) und CoSi2/Si(100)-Heterostrukturen
Schmid, M.
2001
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5
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Ferroelectric BaTiO3 thin film optical waveguide modulators
Petraru, A.
2001
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6
Journal Article
Composition analysis of oxidized buried SiC layers in silicon from EFTEM images
Attenberger, W.
2001
Materials science in semiconductor processing, 4 (2001) S. 187
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Schmid, M.
Buchal, C.
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Schubert, Jürgen
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Siegert, M.
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Stritzker, B.
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Research Program
Ionentechnik
Contributing Institute
Institut für Halbleiterschichten und Bauelemente; ISG-1
6
Institut für Bio- und Chemosensoren; ISG-2
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Scientific Report
2001
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