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1

Journal Article

The influence of an epitaxial CoSi2 layer on diffusion of B and Sb in underlying Si during oxidation

Tyagi, A. K.
1999

Fresenius' journal of analytical chemistry, 365 (1999) S. 282 - 285

2

Talk (non-conference)

Growth, patterning and microelectronic applications of epitaxial cobaltdisilicide

Mantl, S.
1999

3

Physik moderner Halbleiterbauelemente

Ehrhart, P.
1999

4

Talk (non-conference)

Strain relaxed Si(1-x)Gex layers on Si(100) after hydrogen implantation and annealing

Mantl, S.
1999

5

Journal Article

Strain relaxation of epitaxial SiGe layers on Si(100) improved by hydrogen implantation

Mantl, S.
1999

Nuclear instruments & methods in physics research / B, 147 (1999) S. 29

6

Journal Article

Self-assembled patterning of ultrathin silicides by local oxidation

Mantl, S.
1999

MRS bulletin, 24 (1999) S. 31

7

Physik moderner Halbleiterbauelemente

Mantl, S.
1999

8

Talk (non-conference)

Nanopatterning of epitaxial CoSi2 and its use for Nano-MOSFET fabrication

Mantl, S.
1999

9

Contribution to a book
Contribution to a conference proceedings

Nanopatterning of epitaxial CoSi2 and its use for Nano-MOSFET fabrication

Mantl, S.
1999

10

Contribution to a book
Contribution to a conference proceedings

Growth, patterning and microelectronic applications of epitaxial cobalt-di-silicide

Mantl, S.
1999

11

Talk (non-conference)

Growth of epitaxial silicides by ion beam synthesis and molecular beam allotaxy and self-assembled pattering of ultrathin CoSi2

Mantl, S.
1999

12

Talk (non-conference)

Epitaxial CoSi2 layers : growth processes and applications

Mantl, S.
1999

13

Talk (non-conference)

Applications of epitaxial CoSi2

Mantl, S.
1999

14

Contribution to a book
Contribution to a conference proceedings

Ultrafast Si-based MSM mesa photodetectors with optical waveguide connection

Buchal, C.
1999

15

Journal Article

Effect of an epitaxial CoSi2 layer on diffusion of B and Sb in Si during annealing and oxidation

Tyagi, A. K.
1999

Journal of applied physics, 85 (1999) S. 7639

OpenAccess OpenAccess

16

Physik moderner Halbleiterbauelemente

Ehrhart, P.
1999

17

Ferienschule (Praktikum) über Untersuchungsmethoden der Oberflächen- und Dünnschichtphysik

Bonzel, D. I.
1999

18

Talk (non-conference)

Strain relaxed Si(1-x)Gex layers on Si(100) after hydrogen implantation

Holländer, B.
1999

19

Talk (non-conference)

Spannungsrelaxation von Si(1-x)Gex/Si Heterostrukturen induziert durch Wasserstoffimplantation

Rongen, S.
1999

20

New high-precision 5-Axis RBS/channeling goniometer for ion beam analysis of 150 mm wafers

Holländer, B.
1999

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