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1

Journal Article

Retarded diffusion of boron in Si due to the formation of an epitaxial CoSi2 layer

Kappius, L.
1999

Thin solid films, 336 (1999) S. 26

2

Contribution to a book
Contribution to a conference proceedings

Effect of the oxidation of a silicide layer on dopant diffusion in underlying silicon

Kappius, L.
1999

3

Talk (non-conference)

Strain relaxed Si(1-x)Gex layers on Si(100) after hydrogen implantation

Holländer, B.
1999

4

New high-precision 5-Axis RBS/channeling goniometer for ion beam analysis of 150 mm wafers

Holländer, B.
1999

5

Journal Article

Enhanced strain relaxation of epitaxial SiGe layers on Si(100)after H+ ion implantation

Holländer, B.
1999

Nuclear instruments & methods in physics research / B, 148 (1999) S. 200

6

Journal Article

Silicon quantum integrated circuits : an attempt to fabricate silicon-based quantum devices using CMOS fabrication techniques

Paul, D. J.
1999

Thin solid films, 336 (1999) S. 130

7

Talk (non-conference)

Strain relaxed Si(1-x)Gex layers on Si(100) after hydrogen implantation and annealing

Mantl, S.
1999

8

Journal Article

Strain relaxation of epitaxial SiGe layers on Si(100) improved by hydrogen implantation

Mantl, S.
1999

Nuclear instruments & methods in physics research / B, 147 (1999) S. 29

9

Journal Article

Self-assembled patterning of ultrathin silicides by local oxidation

Mantl, S.
1999

MRS bulletin, 24 (1999) S. 31

10

Physik moderner Halbleiterbauelemente

Mantl, S.
1999

11

Talk (non-conference)

Nanopatterning of epitaxial CoSi2 and its use for Nano-MOSFET fabrication

Mantl, S.
1999

12

Contribution to a book
Contribution to a conference proceedings

Nanopatterning of epitaxial CoSi2 and its use for Nano-MOSFET fabrication

Mantl, S.
1999

13

Contribution to a book
Contribution to a conference proceedings

Growth, patterning and microelectronic applications of epitaxial cobalt-di-silicide

Mantl, S.
1999

14

Talk (non-conference)

Growth of epitaxial silicides by ion beam synthesis and molecular beam allotaxy and self-assembled pattering of ultrathin CoSi2

Mantl, S.
1999

15

Talk (non-conference)

Epitaxial CoSi2 layers : growth processes and applications

Mantl, S.
1999

16

Talk (non-conference)

Applications of epitaxial CoSi2

Mantl, S.
1999

17

Ultrafast silicon based internal photoemission detectors

Löken, M.
1999

18

Contribution to a book
Contribution to a conference proceedings

Ultrafast silicon based internal photoemission detectors

Löken, M.
1999

19

Strukturelle, elektrische und optische Charakterisierung halbleitender Ru2Si3-Schichten

Lenssen, D.
1999

20

Structural electrical and optical characterization of semiconductor Ru2Si3

Lenssen, D.
1999

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