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1999

Ionentechnik

Mesters, S.

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1999

Ionentechnik

Mesters, S.

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Contribution to a book 3 Contribution to a conference proceedings 3 Journal Article 3 Talk (non-conference) 3 Poster 2 Conference Presentation 1

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1

Talk (non-conference)

Strain relaxed Si(1-x)Gex layers on Si(100) after hydrogen implantation

Holländer, B.
1999

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2

Journal Article

Enhanced strain relaxation of epitaxial SiGe layers on Si(100)after H+ ion implantation

Holländer, B.
1999

Nuclear instruments & methods in physics research / B, 148 (1999) S. 200

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3

Talk (non-conference)

Nanometer Schottky-tunneling MOSFETs fabricated by a novel silicide nanopatterning method

Zhao, Q. T.
1999

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4

Journal Article

Nanometer patterning of epitaxial CoSi2/Si(100) by local oxidation

Zhao, Q. T.
1999

Solid state electronics, 43 (1999) S. 1091

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5

Nanometer patterning of ultra-thin cobalt disilicide by local application of stress

Zhao, Q. T.
1999

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6

Contribution to a book
Contribution to a conference proceedings

Fabrication of nanometer Schottky-tunnel MOSFETs by a novel silicide nanopatterning method

Zhao, Q. T.
1999

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7

Conference Presentation

Fabrication of nanometer Schottky-tunnel MOSFETs by a novel silicide nanopatterning method

Zhao, Q. T.
1999

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8

Electrochemical pH-sensitive thin films prepared by PLD

Schubert, J.
1999

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9

Journal Article

Strain relaxation of epitaxial SiGe layers on Si(100) improved by hydrogen implantation

Mantl, S.
1999

Nuclear instruments & methods in physics research / B, 147 (1999) S. 29

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10

Talk (non-conference)

Nanopatterning of epitaxial CoSi2 and its use for Nano-MOSFET fabrication

Mantl, S.
1999

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11

Contribution to a book
Contribution to a conference proceedings

Nanopatterning of epitaxial CoSi2 and its use for Nano-MOSFET fabrication

Mantl, S.
1999

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12

Contribution to a book
Contribution to a conference proceedings

Growth, patterning and microelectronic applications of epitaxial cobalt-di-silicide

Mantl, S.
1999

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Publications database 12

Contribution to a book 3 Contribution to a conference proceedings 3 Journal Article 3 Talk (non-conference) 3 Poster 2 Conference Presentation 1

Mesters, S. Mantl, S. 11 Kappius, L. 8 Zhao, Q. T. 8 Holländer, Bernhard 3 Kabius, B. 3 more ... Dolle, M. 2 Hackbarth, T. 2 Herzog, H. J. 2 Kibbel, H. 2 Klinkhammer, F. 2 Kluth, P. 2 Liedtke, R. 2 Xu, J. 2 Antons, A. 1 Bay, H. L. 1 Buchal, C. 1 Heinig, K. H. 1 Löken, M. 1 Rongen, S. 1 Schubert, Jürgen 1 Schöning, Michael J. 1 Simonis, A. 1 Trinkaus, H. 1 Zander, W. 1 see all ... less ...

Institut für Schicht- und Ionentechnik; ISI 12

1999

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