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1999
Ionentechnik
Contribution to a book
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1999
Ionentechnik
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1
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Nanopatterning of epitaxial CoSi2 and its use for Nano-MOSFET fabrication
Mantl, S.
1999
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Growth, patterning and microelectronic applications of epitaxial cobalt-di-silicide
Mantl, S.
1999
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Ultrafast Si-based MSM mesa photodetectors with optical waveguide connection
Buchal, C.
1999
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The physics of modulators
Buchal, C.
1999
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Ionenimplantation für photorefractive Kristalle und optische Emitter
Buchal, C.
1999
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Fabrication of nanometer Schottky-tunnel MOSFETs by a novel silicide nanopatterning method
Zhao, Q. T.
1999
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Ultrafast silicon based internal photoemission detectors
Löken, M.
1999
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Buchal, C.
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Kappius, L.
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Mantl, S.
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Löken, M.
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Kabius, B.
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Ionentechnik
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Institut für Schicht- und Ionentechnik; ISI
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1999
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