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Journal Article
PZT thin films for piezoelectric microactuator applications
Kueppers, H.
2002
Sensors and actuators
/ A, 97-98 (2002) S. 680 - 684
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Elektrokeramische Materialien; IFF-EKM
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