Skip to content
Toggle navigation
VuFind
0
Items in e-Shelf
(Full)
History
User Account
Logout
User Account
Help
English
Deutsch
Books & more
Articles & more
JuSER
All Fields
Title
Name
Research Program
Contributing Institute
DOI
Scientific Report (Year)
Year of Publication
Full Texts (available in selection)
Find
Advanced
Ask a Librarian
Document Type within your search.
Document Type within your search.
Contribution to a book
2
Journal Article
2
Conference Presentation
1
Contribution to a conference proceedings
1
JuSER
: Hits
1 - 5
of
5
sort by
Relevance
Year (descending)
Year (ascending)
Title
Year (descending), Title A-Z
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Select result number 1
1
Journal Article
LaLuO3 higher-k dielectric integration in SOI MOSFETs with a gate-first process
Nichau, A.
2012
Solid state electronics, 71 (2012) S. 19 - 24
“
...
Lenk
,
St
....
”
Favorites
Saved in:
QR Code
JuSER Publications Portal
Select result number 2
2
Contribution to a book
Electrical and structural properties of ternary rare-earth oxides on Si and higher mobility substrates and their integration as high-k gate dielectrics in MOSFET devices
Lopes, J.M.J.
2011
“
...
Lenk
,
St
....
”
Favorites
Saved in:
QR Code
JuSER Publications Portal
Select result number 3
3
Contribution to a book
Contribution to a conference proceedings
Lanthanum Lutetium oxide integration in a gate-first process on SOI MOSFETs
Nichau, A.
2011
“
...
Lenk
,
St
....
”
Favorites
Saved in:
QR Code
JuSER Publications Portal
Select result number 4
4
Journal Article
Atomic layer deposition of HfO2 and Al2O3 layers on 300 mm Si wafers for gate stack technology
Lupták, R.
2011
Journal of vacuum science & technology / B, 29 (2011) S. 01A301
“
...
Lenk
,
St
....
”
Favorites
Saved in:
QR Code
JuSER Publications Portal
Select result number 5
5
Conference Presentation
Lanthanum Lutetium oxide integration in a gate-first process on SOI MOSFETs
Nichau, A.
2011
“
...
Lenk
,
St
....
”
Favorites
Saved in:
QR Code
JuSER Publications Portal
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Back
Narrow Search Results
Collection
Publications database
5
Document Type
Contribution to a book
2
Journal Article
2
Conference Presentation
1
Contribution to a conference proceedings
1
Name
Besmehn, A.
5
Lenk, Steffi
5
Lopes, J.M.J.
5
Mantl, S.
5
Schnee, M.
5
Schubert, Jürgen
5
more ...
Dürgün-Özben, Eylem
4
Habicht, S.
4
Luptak, R.
4
Nichau, A.
4
Zhao, Q.T.
4
Buca, Dan Mihai
3
Castro, G.R.
3
Knoll, L.
3
Luysberg, Martina
3
Mussmann, V.
3
Rubio-Zuazo, J.
3
Breuer, U.
2
Tiedemann, Andreas
2
Baumann, P.K.
1
Durgun Özben, E.
1
Feste, S.
1
Heuken, M.
1
Holländer, Bernhard
1
Lupták, R.
1
Luysberg, M.
1
Yu, W.
1
see all ...
less ...
Research Program
Grundlagen für zukünftige Informationstechnologien
5
Contributing Institute
Halbleiter-Nanoelektronik; PGI-9
5
JARA-FIT; JARA-FIT
5
Mikrostrukturforschung; PGI-5
3
Zentralabteilung für Chemische Analysen; ZCH
3
Halbleiter-Nanoelektronik; IBN-1
1
Scientific Report
2011
4
2012
1
Year of Publication
From:
To:
×
Loading...