JuLib | Articles & more - {"Mikrostrukturforschung; IFF-IMF"}

1

From thin relaxed SiGe buffer to strained silicon directly on oxide

Mantl, S.
2006

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

2

Contribution to a book
Contribution to a conference proceedings

Relaxation of SiGe/Si heterostructures by helium implantation and subsequent annealing: Helium acting as dislocation sources

Hueging, N.
2006

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

3

Conference Presentation

Strained silicon on relaxed SiGe made by ion implantation and strain transfer

Mantl, S.
2004

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

4

Contribution to a book
Contribution to a conference proceedings

He implantation induced relaxation of SiGe/Si: Nucleation of dislocations and coarsing of He bubbles

Luysberg, M.
2004

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

5

Contribution to a book
Contribution to a conference proceedings

Strained silicon on relaxed SiGe made by ion implantation and strain transfer

Mantl, S.
2004

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

6

Journal Article

Microstructure evolution effects of helium redistribution in as-implanted silicon and Si0.8Ge0.2/Si heterostructures

Mörschbächer, M. J.
2004

Nuclear instruments & methods in physics research / B, 219-220 (2004) S. 703 - 707

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

7

Contribution to a book
Contribution to a conference proceedings

In-situ TEM on He implantation induced defects in SiGe/Si

Luysberg, M.
2004

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

8

Contribution to a book
Contribution to a conference proceedings

The use of ion implantation and annealing for the fabrication of strained silicon on thin SiGe virtual substrates

Buca, D.
2004

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

9

Journal Article

High frequency n-Type MODFETs on ultra-thin virtual SiGe substrates

Hackbarth, T.
2003

Solid state electronics, 47 (2003) S. 1179 - 1182

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

10

Contribution to a book
Contribution to a conference proceedings

Thin strain relaxed SiGe buffer layers on Si and SOI made by He ion implantation and annealing

Mantl, S.
2003

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

11

Poster

Thin strain relaxed SiGe buffer layers on Si and SOI made by He ion implantation and annealing

Mantl, S.
2003

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

12

Conference Presentation

Strain relaxation of He implanted, pseudomorphic Si1-xGex layers on Si(100)

Luysberg, M.
2002

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

13

Conference Presentation

Quantitative TEM analysis on the pressure of helium filled nano-cracks in implanted Si

Hueging, N.
2002

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

14

Contribution to a book
Contribution to a conference proceedings

Effect of helium ion implantation and annealing on the relaxation behaviour of pseudomorphic Si1-xGex/Si(100) buffer layers on Si (100) substrates

Luysberg, M.
2002

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

15

Contribution to a book
Contribution to a conference proceedings

Strain relaxation of He implanted, pseudomorphic Si1-xGex layers on Si(100)

Holländer, B.
2002

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

16

Journal Article

Si/SiGe n-MODFETs on thin SiGe virtual substrates prepared by means of He implantation

Herzog, H.-J.
2002

IEEE Electron Device Letters, 23 (2002) S. 485 - 487

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

17

Contribution to a book
Contribution to a conference proceedings

Quantitative TEM analysis on the pressure of helium filled nano-cracks in implanted silicon

Hüging, N.
2002

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

18

Contribution to a book
Contribution to a conference proceedings

Strain relaxation of He implanted, pseudomorphic Si1-xGex layers on Si(100)

Luysberg, M.
2002

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

19

Journal Article

Effect of helium ion implantation and annealing on the relaxation behaviour of pseudomorphic Si1-xGex/Si(100) buffer layers on Si (100) substrates

Luysberg, M.
2002

Journal of applied physics, 92 (2002) S. 4290 - 4295

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”
OpenAccess

20

Journal Article

Si/SiGe n-MOSFETs on thin SiGe virtual substrates prepared by means of implantation

Herzog, H.-J.
2002

IEEE Electron Device Letters, 23 (2002) S. 485

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”
OpenAccess

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