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Polymers for high technology: electronics and photonics : Polymers for high technology: symposium : Meeting of the American Chemical Society. 0192 : Anaheim, CA, 07.09.86-12.09.86.
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Other Personal Name(s): “...Bowden, M. J....”
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Advances in resist technology and processing : 0004: proceedings : Santa-Clara, CA, 02.03.87-03.03.87.
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Introduction to microlithography : theory, materials, and processing [E-Book] /
Other Personal Name(s): “...Bowden, M. J....”

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