Silicon nitride for microelectronic applications. 1 : Preparation and properties.
Saved in:
Personal Name(s): | Milek, J. T. |
---|---|
Imprint: |
New-York, NY :
IFI/Plenum,
1971.
|
Physical Description: |
VIII, 118 S. |
Note: |
englisch |
ISBN: |
9780306671036 0306671034 |
Series Title: |
Handbook of electronic materials ;
3. |
Keywords: |
silicon nitride film : microelectronics : film deposition silicon nitride film : physical prop |
Classification: | |
Shelf Classification: |
ZB | |
---|---|
Reading Room ![]() |