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Cover Image

Silicon nitride for microelectronic applications. 1 : Preparation and properties.

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Personal Name(s): Milek, J. T.
Imprint: New-York, NY : IFI/Plenum, 1971.
Physical Description: VIII, 118 S.
Note: englisch
ISBN: 9780306671036
0306671034
Series Title: Handbook of electronic materials ; 3.
Keywords: silicon nitride film : microelectronics : film deposition
silicon nitride film : physical prop
Classification:
FAAB - Solid state physics - reference books
FGMH - Metallization, physics of microelectronics
FFPE - Thin film electronic properties, semiconductor interfaces
FJKB - Elemental semiconductors
Shelf Classification:
SHE - Festkörperphysikalische Daten - Tabellenwerke
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ZB
Reading Room Call Number: SHE 014-03 Barcode: 1087000198 Reference Collection

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