Silicon nitride for microelectronic applications. Preparation and properties. 1 :

Saved in:
Milek, J. T.
New-York, NY : IFI/Plenum, 1971.
VIII, 118 S.
englisch
9780306671036
0306671034
Handbook of electronic materials ; 3.
silicon nitride film : microelectronics : film deposition
silicon nitride film : physical prop

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