Silicon nitride for microelectronic applications. 1 : Preparation and properties.
Saved in:
| Personal Name(s): | Milek, J. T. |
|---|---|
| Imprint: |
New-York, NY :
IFI/Plenum,
1971.
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| Physical Description: |
VIII, 118 S. |
| Note: |
englisch |
| ISBN: |
9780306671036 0306671034 |
| Series Title: |
Handbook of electronic materials ;
3. |
| Keywords: |
silicon nitride film : microelectronics : film deposition silicon nitride film : physical prop |
| Classification: | |
| Shelf Classification: |
| ZB | |
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Reading Room  Call Number: SHE 014-03 Barcode: 1087000198
Reference Collection
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