Microcircuit engineering 1987 : International conference on microlithography: proceedings : Paris, 22.09.87-25.09.87.
Microcircuit engineering: microlithography :
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| Personal Name(s): | Castagne, R., (editor) |
|---|---|
| Imprint: |
Amsterdam :
North Holland,
1987.
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| Physical Description: |
708 S. |
| Note: |
englisch |
| Series Title: |
Microelectronic engineering ;
vol 0006. |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
| ZB | |
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Reading Room  Call Number: FGM 088-1987 Barcode: 9900003621
Available
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