Microcircuit engineering 1987 : International conference on microlithography: proceedings : Paris, 22.09.87-25.09.87.
Microcircuit engineering: microlithography :
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Personal Name(s): | Castagne, R., editor |
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Imprint: |
Amsterdam :
North Holland,
1987.
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Physical Description: |
708 S. |
Note: |
englisch |
Series Title: |
Microelectronic engineering ;
vol 0006. |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
ZB | |
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