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Cover Image

Microcircuit engineering 1987 : International conference on microlithography: proceedings : Paris, 22.09.87-25.09.87.

Microcircuit engineering: microlithography :

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Personal Name(s): Castagne, R., editor
Imprint: Amsterdam : North Holland, 1987.
Physical Description: 708 S.
Note: englisch
Series Title: Microelectronic engineering ; vol 0006.
Subject (ZB):
optical microlithography
Classification:
FGME - Microlithography
Shelf Classification:
FGM - Mikroelektronik - Technologie
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Reading Room Call Number: FGM 088-1987 Barcode: 9900003621 Available   

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