APA Citation

Boyd, I. W. (1987). Laser processing of thin films and microstructures: Oxidation, deposition and etching of insulators. Berlin: Springer.

Chicago Style Citation

Boyd, I. W. Laser Processing of Thin Films and Microstructures: Oxidation, Deposition and Etching of Insulators. Berlin: Springer, 1987.

MLA Citation

Boyd, I. W. Laser Processing of Thin Films and Microstructures: Oxidation, Deposition and Etching of Insulators. Berlin: Springer, 1987.

Warning: These citations may not always be 100% accurate.