Silicon nitride in electronics.

Saved in:
Belyi, V. I., (Mitarb.)
Amsterdam : Elsevier, 1988.
VIII, 263 S.
Aus d. Russ. übers.
Materials science monographs ; vol 0034.
dielectric silicon nitride films
deposition processes of silicon nitride films from gas phase
silicon nitride: methods of synthesis
silicon nitride films: modeling of low pressure cvd processes
silicon nitride: structure and chemical composition
physical/chemical transformations in silicon nitride films
electronic structure and optical properties of silicon nitride
silicon nitride layers: electrophysical properties (polarization, recombination, nonstoichiometry)
application of silicon nitride films in microelectronics

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