Silicon nitride in electronics.
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| Personal Name(s): | Belyi, V. I., Mitarb. |
|---|---|
| Imprint: |
Amsterdam :
Elsevier,
1988.
|
| Physical Description: |
VIII, 263 S. |
| Note: |
Aus d. Russ. übers. englisch |
| ISBN: |
9780444426895 0444426892 |
| Series Title: |
Materials science monographs ;
vol 0034. |
| Keywords: |
dielectric silicon nitride films deposition processes of silicon nitride films from gas phase silicon nitride: methods of synthesis silicon nitride films: modeling of low pressure cvd processes silicon nitride: structure and chemical composition physical/chemical transformations in silicon nitride films electronic structure and optical properties of silicon nitride silicon nitride layers: electrophysical properties (polarization, recombination, nonstoichiometry) application of silicon nitride films in microelectronics |
| Classification: | |
| Shelf Classification: |
| ZB | |
|---|---|
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