APA Citation

(1987). Leading edge of VLSI manufacturing technology: Semicon / Osaka Technology Seminar : 1987: proceedings : Osaka, 25.06.87-26.06.87. Mountain-View, CA: Semiconductor Equipment and Materials Institute.

Chicago Style Citation

Leading Edge of VLSI Manufacturing Technology: Semicon / Osaka Technology Seminar : 1987: Proceedings : Osaka, 25.06.87-26.06.87. Mountain-View, CA: Semiconductor Equipment and Materials Institute, 1987.

MLA Citation

Leading Edge of VLSI Manufacturing Technology: Semicon / Osaka Technology Seminar : 1987: Proceedings : Osaka, 25.06.87-26.06.87. Mountain-View, CA: Semiconductor Equipment and Materials Institute, 1987.

Warning: These citations may not always be 100% accurate.