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VLSI metallization.

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Personal Name(s): Einspruch, N. G., editor
Imprint: Orlando, FL : Academic Pr., 1987.
Physical Description: X, 480 S.
Note: englisch
ISBN: 9780122341151
0122341155
Series Title: VLSI electronics microstructure science ; 15.
Keywords: electrical properties of thin conducting films
metallurgical properties of thin conducting films
metallization techniques
methods of metal patterning and etching
gate metallization
contact metallization
multilevel metallization schemes
electromigration in interconnects and contacts
metallization technology for gallium arsenide integrated circuits
interconnections, dissipation, and computation
Classification:
FGM - Microelectronic technology
FGMH - Metallization, physics of microelectronics
Shelf Classification:
FGM - Mikroelektronik - Technologie
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Institute Call Number: B 054847'01'-015 Barcode: 1089100578 Available   
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Reading Room Call Number: FGM 019-15 Barcode: 1088103972 Available   

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