VLSI metallization.

Saved in:
Einspruch, N. G., (editor)
Orlando, FL : Academic Pr., 1987.
X, 480 S.
englisch
9780122341151
0122341155
VLSI electronics microstructure science ; 15.
electrical properties of thin conducting films
metallurgical properties of thin conducting films
metallization techniques
methods of metal patterning and etching
gate metallization
contact metallization
multilevel metallization schemes
electromigration in interconnects and contacts
metallization technology for gallium arsenide integrated circuits
interconnections, dissipation, and computation

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