VLSI metallization.
Saved in:
| Personal Name(s): | Einspruch, N. G., (editor) |
|---|---|
| Imprint: |
Orlando, FL :
Academic Pr.,
1987.
|
| Physical Description: |
X, 480 S. |
| Note: |
englisch |
| ISBN: |
9780122341151 0122341155 |
| Series Title: |
VLSI electronics microstructure science ;
15. |
| Keywords: |
electrical properties of thin conducting films metallurgical properties of thin conducting films metallization techniques methods of metal patterning and etching gate metallization contact metallization multilevel metallization schemes electromigration in interconnects and contacts metallization technology for gallium arsenide integrated circuits interconnections, dissipation, and computation |
| Classification: | |
| Shelf Classification: |
Call Number: B 054847'01'-015 Barcode: 1089100578
