Jaeger, R. C. (1988). Introduction to microelectronic fabrication: Richard C. Jaeger. Reading, MA: Addison Wesley.
Chicago Style CitationJaeger, Richard C. Introduction to Microelectronic Fabrication: Richard C. Jaeger. Reading, MA: Addison Wesley, 1988.
MLA CitationJaeger, Richard C. Introduction to Microelectronic Fabrication: Richard C. Jaeger. Reading, MA: Addison Wesley, 1988.
Warning: These citations may not always be 100% accurate.