APA Citation

Jaeger, R. C. (1988). Introduction to microelectronic fabrication: Richard C. Jaeger. Reading, MA: Addison Wesley.

Chicago Style Citation

Jaeger, Richard C. Introduction to Microelectronic Fabrication: Richard C. Jaeger. Reading, MA: Addison Wesley, 1988.

MLA Citation

Jaeger, Richard C. Introduction to Microelectronic Fabrication: Richard C. Jaeger. Reading, MA: Addison Wesley, 1988.

Warning: These citations may not always be 100% accurate.