SEM microcharacterization of semiconductors.

Saved in:
Holt, D. B., (editor)
London : Academic Pr., 1989.
XIII, 452 S.
Techniques of physics ; 12.
Fundamentals of microcharacterization in electron beam instruments
introduction to multimode scanning electron microscopy
modeling electron beam interactions in semiconductors
SEM: electron channeling patterns
SEM: the emissive mode and x-ray microanalysis
Quantitation and the interpretation of signals in the individual modes of scanning electron microscope (SEM)
voltage contrast and stroboscopy
the conductive mode
scanning deep level transient spectroscopy
cathodoluminescence characterization of semiconductors
the electron acoustic mode

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