SEM microcharacterization of semiconductors.
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| Personal Name(s): | Holt, D. B., (editor) |
|---|---|
| Imprint: |
London :
Academic Pr.,
1989.
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| Physical Description: |
XIII, 452 S. |
| Note: |
englisch |
| ISBN: |
9780123538550 0123538556 |
| Series Title: |
Techniques of physics ;
12. |
| Keywords: |
Fundamentals of microcharacterization in electron beam instruments introduction to multimode scanning electron microscopy modeling electron beam interactions in semiconductors SEM: electron channeling patterns SEM: the emissive mode and x-ray microanalysis Quantitation and the interpretation of signals in the individual modes of scanning electron microscope (SEM) voltage contrast and stroboscopy the conductive mode scanning deep level transient spectroscopy cathodoluminescence characterization of semiconductors the electron acoustic mode |
| Classification: | |
| Shelf Classification: |
| ZB | |
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