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Cover Image

SEM microcharacterization of semiconductors.

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Personal Name(s): Holt, D. B., editor
Imprint: London : Academic Pr., 1989.
Physical Description: XIII, 452 S.
Note: englisch
ISBN: 9780123538550
0123538556
Series Title: Techniques of physics ; 12.
Keywords: Fundamentals of microcharacterization in electron beam instruments
introduction to multimode scanning electron microscopy
modeling electron beam interactions in semiconductors
SEM: electron channeling patterns
SEM: the emissive mode and x-ray microanalysis
Quantitation and the interpretation of signals in the individual modes of scanning electron microscope (SEM)
voltage contrast and stroboscopy
the conductive mode
scanning deep level transient spectroscopy
cathodoluminescence characterization of semiconductors
the electron acoustic mode
Classification:
FGML - Characterization of electronic materials
FHJ - Scanning electron microscopy, analytical electron microscopy
Shelf Classification:
FHJ - Rasterelektronenmikroskopie, Mikrostrahlanalyse
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Reading Room Call Number: FHJ 021 Barcode: 1089106702 Available   
Open Stacks Call Number: S 002023-0012'01' Barcode: 1089106703 Available   

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