Advances in electronics and electron physics. Microelectronics and microscopy / Peter W. Hawkes Hrsg.
Saved in:
Personal Name(s): | Hawkes, Peter W., editor |
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Imprint: |
Boston, Mass. :
Academic Pr.,
1992
|
Physical Description: |
XI, 282 S. |
Note: |
englisch |
ISBN: |
0120147254 9780120147250 |
Series Title: |
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Advances in electronics and electron physics ;
83 |
Keywords: |
vacuum microelectronics nanometric scale electron beam lithography LVSEM (low voltage scanning electron microscopy) for high resolution topographic and density contrast imaging |
Subject (ZB): | |
Classification: |
ZB | |
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Open Stacks Call number: S 000100-0083'01' Barcode: 1092102857 Available |