Advances in electronics and electron physics. Peter W. Hawkes Hrsg. Microelectronics and microscopy /

Saved in:
Hawkes, Peter W., (editor)
Boston, Mass. : Academic Pr., 1992
XI, 282 S.
englisch
0120147254
9780120147250
Advances in electronics and electron physics ; 83
vacuum microelectronics
nanometric scale electron beam lithography
LVSEM (low voltage scanning electron microscopy) for high resolution topographic and density contrast imaging

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