The mechanical properties of semiconductors.
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| Personal Name(s): | Faber, K. T., editor |
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| Imprint: |
Boston, MA :
Academic Pr.,
1992.
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| Physical Description: |
X, 375 S. |
| Note: |
englisch |
| ISBN: |
0127521372 9780127521374 |
| Series Title: |
Semiconductors and semimetals ;
37. |
| Keywords: |
elastic constants and related properties of semiconductor compounds and their alloys fracture of silicon and other semiconductors the plasticity of elemental and compound semiconductors mechanical behavior of compound semiconductors deformation behavior of compound semiconductors injection of dislocations into strained multilayer structures critical technologies for the micromachining of silicon processing and semiconductor thermoelastic behavior |
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