Reaktives Sputtern von Oxidfilmen: Herstellung dielektrischer dünner Schichten für technische Anwendungen / J. Stollenwerk.
reactive sputtering of oxide layers: preparation of dielectric thin films for technical applications
Saved in:
Personal Name(s): | Stollenwerk, J. |
---|---|
Imprint: |
Aachen :
Verlag der Augustinus Buchhandlung,
1993.
|
Physical Description: |
131 S. |
Note: |
deutsch |
ISBN: |
3860730894 9783860730898 |
Series Title: |
/* Depending on the record driver, $field may either be an array with
"name" and "number" keys or a flat string containing only the series
name. We should account for both cases to maximize compatibility. */?>
Aachener Beiträge zur Physik der kondensierten Materie ;
5. |
Subject (ZB): | |
Classification: |
IBN-1-2 | |
---|---|
Institute Call number: S 007410-0005'01' Barcode: 1093102473 Available |