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Cover Image

Advances in epitaxy and endotaxy : selected chemical problems / edited by H. G. Schneider and V. Ruth, with the cooperation of T. Kormany.

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Personal Name(s): Schneider, Helmut Günther.
Ruth, Volker. / Normany, T.
Imprint: Amsterdam, New York : Elsevier Scientific Pub. Co., 1976.
Physical Description: 344 p.
Note: englisch
ISBN: 0444998454
9780444998453
Keywords: technological significance of epitaxial and endotaxial intergrowth processes for the production of discrete electronic components and integrated microelectronic circuits
the formation of epitaxial semiconductor films by chemical vapor deposition (CVD)
formation of epitaxial semiconductor layers by evaporation and interdiffusion under isothermal conditions
formation of epitaxial semiconductor films by crystal growth from the melt
chemoepitaxial and chemoendotaxial layer growth on metals
Subject (ZB):
epitaxy
semiconducting film
Classification:
FGK - Thin film technology, epitaxy
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