Resists in microlithography and printing.
Saved in:
Personal Name(s): | Bednar, B. |
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Kralicek, J. / Zachoval, J. / Yeltsov, A. V., Mitarb. | |
Imprint: |
Amsterdam :
Elsevier,
1993.
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Physical Description: |
376 S. |
Note: |
Aus d. Tsch. uebers. englisch |
ISBN: |
0444988467 9780444988461 |
Series Title: |
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Materials science monographs ;
vol 0076. |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
ZB | |
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Reading Room Call number: FGM 011 Barcode: 1095100286 Available |