Resists in microlithography and printing.
Saved in:
| Personal Name(s): | Bednar, B. |
|---|---|
| Kralicek, J. / Zachoval, J. / Yeltsov, A. V., Mitarb. | |
| Imprint: |
Amsterdam :
Elsevier,
1993.
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| Physical Description: |
376 S. |
| Note: |
Aus d. Tsch. uebers. englisch |
| ISBN: |
0444988467 9780444988461 |
| Series Title: |
Materials science monographs ;
vol 0076. |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
| ZB | |
|---|---|
Reading Room  Call Number: FGM 011 Barcode: 1095100286
Available
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