Skip to content
VuFind
  • 0 Items in e-Shelf (Full)
  • History
  • User Account
  • Logout
  • User Account
  • Help
    • English
    • Deutsch
  • Books & more
  • Articles & more
  • JuSER
Advanced
 
  • Literature Request
  • Cite this
  • Email this
  • Export
    • Export to RefWorks
    • Export to EndNoteWeb
    • Export to EndNote
    • Export to MARC
    • Export to MARCXML
    • Export to BibTeX
  • Favorites
  • Add to e-Shelf Remove from e-Shelf
Cover Image

Vakuumbeschichtung Vol 0001: Plasmaphysik, Plasmadiagnostik, Analytik.

Saved in:
Personal Name(s): Frey, H., editor
Imprint: Düsseldorf : VDI Verl., 1995.
Physical Description: XI, 337 S.
Note: deutsch
ISBN: 9783184013110
3184013111
Series Title: Vakuumbeschichtung ; Vol 0001.
Subject (ZB):
vacuum deposition
thin film technology
ion implantation
plasma physics
plasma diagnostics
surface analysis
Classification:
FGKC - Vacuum deposition, MBE
FGKJ - Plasma processing, etching
Shelf Classification:
FGK - Dünnfilmtechnologie, Epitaxie
  • Holdings
  • Staff View

ZB
Reading Room Call Number: FGK 114-01 Barcode: 1096101497 Available   

  • Forschungszentrum Jülich
  • Central Library (ZB)
  • Powered by VuFind 6.1.1
Loading...