Untersuchungen zum elektrochemischen Ätzverhalten von Siliziumoberflächen / Ruth Houbertz.
study of electrochemical etching of silicon surfaces
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Personal Name(s): | Houbertz, Ruth. |
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Imprint: |
1993.
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Physical Description: |
164 S. |
Note: |
deutsch |
Dissertation Note: |
Ulm, Univ., Diss., 1993
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Open Stacks Call number: B 079011'01' Barcode: 1097102655 Available |