Handbook of chemical vapor deposition (CVD) : principles, technology, and applications / by Hugh O. Pierson.
introduction and general considerations
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Personal Name(s): | Pierson, Hugh O. |
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Edition: |
2nd ed. |
Imprint: |
Norwich :
Noyes Publ.,
1999.
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Physical Description: |
XXIV, 482 S. |
Note: |
englisch |
ISBN: |
0815514328 9780815514329 |
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Shelf Classification: |
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Reading Room Call number: FGK 082 Barcode: 1099103224 Available |