Cleanroom design / ed. by W. Whyte.
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Personal Name(s): | Whyte, W., editor |
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Edition: |
2nd ed. |
Imprint: |
New York, NY :
Wiley,
1999.
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Physical Description: |
XII, 305 S. |
Note: |
englisch |
ISBN: |
9780471942047 0471942049 |
Keywords: |
design of cleanrooms for medical device and microelectronics, international standards for the design of cleanrooms construction materials and surface finishes air filtration design of an ultra pure water system for use in the manufacture of integrated circuits production and transmission of high purity gases for the semiconductor industry |
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Reading Room Call number: TKD 003 Barcode: 1200101335 Available |