Metal impurities in silicon-device fabrication / Klaus Graff.
Saved in:
Personal Name(s): | Graff, Klaus. |
---|---|
Edition: |
2nd, rev. ed. |
Imprint: |
Berlin :
Springer,
2000.
|
Physical Description: |
XV, 268 S. |
Note: |
englisch |
ISBN: |
3540642137 9783540642138 |
Series Title: |
/* Depending on the record driver, $field may either be an array with
"name" and "number" keys or a flat string containing only the series
name. We should account for both cases to maximize compatibility. */?>
Springer series in materials science ;
24. |
Keywords: |
relevant data and properties of the various metal impurities in silicon |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
ZB | |
---|---|
Reading Room ![]() ![]() |