Gate dielectrics and MOS ULSls : principles, technologies and applications / Takashi Hori
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Personal Name(s): | Hori, Takashi, author |
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Imprint: |
Berlin :
Springer,
1997
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Physical Description: |
XIV, 352 Seiten |
Note: |
englisch |
ISBN: |
3540631828 9783540631828 |
Series Title: |
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Springer series in electronics and photonics ;
34 |
Keywords: |
MIS structure ( metal insulator semiconductor ) MOS field effect transistor thermally grown silicon oxide thermally nitrided oxides for flash memories high dielectric constant films for passive capacitances |
Subject (ZB): | |
Classification: |
ZB | |
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Open Stacks Call number: S 003879-0034'01' Barcode: 1200103006 Available |