Proceedings of the Eleventh International Symposium on Plasma Processing : [held in Los Angeles, CA, May 5-10, 1996 .... was held as part of the 189th meeting of the Electrochemial Society] / eds.: G. S. Mathad ...
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Personal Name(s): | Mathad, G. S., editor |
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Imprint: |
Pennington, NJ :
Electrochemical Society,
1996.
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Physical Description: |
XI, 720 S. |
Note: |
englisch |
ISBN: |
9781566771641 1566771641 |
Series Title: |
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Proceedings / Electrochemical Society ;
96-12. |
Keywords: |
process modeling and mechanisms pulsed plasmas plasma sources, mechanisms and measurements etching processes: metals and silicides neutral beam etching etching processes: silicon and polycide etching processes: oxide and dielectric films polymer etching and dry cleaning processes plasma enhanced chemical vapor deposition |
Subject (ZB): | |
Classification: |
ZB | |
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Open Stacks Call number: S 003730-0096,12'01' Barcode: 1201101301 Available |