Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou.
Saved in:
Personal Name(s): | Madou, Marc J. |
---|---|
Edition: |
2nd ed. |
Imprint: |
Boca Raton, Fla. :
CRC Press,
2002.
|
Physical Description: |
723 S. |
Note: |
englisch |
ISBN: |
0849308267 9780849308260 |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
ZB | |
---|---|
Reading Room Call number: FGM 010 Barcode: 1202100948 Available |