Handbook of semiconductor manufacturing technology / ed. by Yoshio Nishi ...
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Personal Name(s): | Nishi, Yoshio, editor |
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Imprint: |
New York, NY :
Dekker,
2000.
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Physical Description: |
XIV, 1157 S. |
Note: |
englisch |
ISBN: |
0824787838 9780824787837 |
Subject (ZB): | |
Classification: | |
Shelf Classification: |
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Reading Room Call number: FGM 012 Barcode: 1202102874 Available |